http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3013377-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3063 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063 |
filingDate | 1990-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2000-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2000-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3013377-B2 |
titleOfInvention | Semiconductor substrate etching method |
priorityDate | 1990-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449188861 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57448911 |
Total number of triples: 12.