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filingDate 1992-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1999-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 1999-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2952539-B2
titleOfInvention Micro processing equipment
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Incoming Links

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Total number of triples: 21.