http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2951609-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302 |
| filingDate | 1997-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1999-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2951609-B2 |
| titleOfInvention | Electron beam inspection equipment |
| priorityDate | 1997-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71308229 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449578015 |
Total number of triples: 15.