http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2930552-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 1996-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1999-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2930552-B2 |
| titleOfInvention | Plasma processing method and plasma processing apparatus |
| priorityDate | 1996-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 |
Total number of triples: 12.