http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2897933-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-00 |
| filingDate | 1990-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1999-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2897933-B2 |
| titleOfInvention | Silicon wafer manufacturing method |
| priorityDate | 1990-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.