http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2863851-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
filingDate | 1994-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1999-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1999-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2863851-B2 |
titleOfInvention | Method for manufacturing semiconductor device |
priorityDate | 1993-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.