http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2822910-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate | 1995-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2822910-B2 |
| titleOfInvention | Method for forming interlayer insulating film of semiconductor device |
| priorityDate | 1995-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.