Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02049 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-02 |
filingDate |
1992-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1998-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
1998-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2804870-B2 |
titleOfInvention |
Cleaning agent for removing metal-containing contaminants and contaminant cleaning method |
priorityDate |
1991-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |