http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2795529-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 1990-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2795529-B2 |
| titleOfInvention | Semiconductor device manufacturing method and manufacturing apparatus |
| priorityDate | 1990-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.