http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2748864-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| filingDate | 1994-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2748864-B2 |
| titleOfInvention | Semiconductor device, method of manufacturing the same, method of manufacturing amorphous carbon film, and plasma CVD apparatus |
| priorityDate | 1994-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.