http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2727090-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 |
| filingDate | 1988-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2727090-B2 |
| titleOfInvention | Vertical heat treatment equipment |
| priorityDate | 1988-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210 |
Total number of triples: 11.