| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32 |
| filingDate |
1996-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1998-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2715288-B2 |
| titleOfInvention |
Method of manufacturing test piece for defect inspection of semiconductor device |
| priorityDate |
1995-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |