http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2666681-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
filingDate | 1993-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1997-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1997-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2666681-B2 |
titleOfInvention | Method for manufacturing semiconductor device |
priorityDate | 1993-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.