| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C3-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67023 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C22-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C3-00 |
| filingDate |
1994-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1997-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2655098-B2 |
| titleOfInvention |
Wafer surface treatment equipment using chemicals |
| priorityDate |
1994-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |