http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2650530-B2

Outgoing Links

Predicate Object
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
filingDate 1991-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1997-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 1997-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2650530-B2
titleOfInvention Gas phase reactor for semiconductor device manufacturing
priorityDate 1991-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16685410
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Total number of triples: 15.