http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2650530-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
filingDate | 1991-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1997-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1997-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2650530-B2 |
titleOfInvention | Gas phase reactor for semiconductor device manufacturing |
priorityDate | 1991-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16685410 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410564089 |
Total number of triples: 15.