http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2644958-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02 |
| filingDate | 1993-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1997-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2644958-B2 |
| titleOfInvention | Ion source device and ion implantation device provided with the ion source device |
| priorityDate | 1993-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.