http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2623276-B2

Outgoing Links

Predicate Object
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
filingDate 1988-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1997-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 1997-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2623276-B2
titleOfInvention Method for manufacturing thin film semiconductor device
priorityDate 1988-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408

Total number of triples: 14.