http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2623276-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
filingDate | 1988-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1997-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1997-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2623276-B2 |
titleOfInvention | Method for manufacturing thin film semiconductor device |
priorityDate | 1988-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408 |
Total number of triples: 14.