http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2611615-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
filingDate | 1992-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1997-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1997-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2611615-B2 |
titleOfInvention | Method for manufacturing semiconductor device |
priorityDate | 1992-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099 |
Total number of triples: 15.