http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2600469-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-365 |
filingDate | 1990-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1997-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1997-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2600469-B2 |
titleOfInvention | Substrate temperature control method in vapor phase epitaxial growth. |
priorityDate | 1990-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91501 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546359 |
Total number of triples: 13.