| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C21D1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C21D1-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 |
| filingDate |
1994-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1997-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2597464-B2 |
| titleOfInvention |
Laser annealing equipment |
| priorityDate |
1994-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |