http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2545818-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 |
filingDate | 1987-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1996-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1996-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2545818-B2 |
titleOfInvention | Resist film and method for forming resist pattern |
priorityDate | 1987-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523906 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6393 |
Total number of triples: 16.