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publicationDate 1996-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2506046-B2
titleOfInvention Ga-based film forming material, Ga-based film forming method, and Ga-based film
priorityDate 1993-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 29.