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filingDate 2020-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2022-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2022553335-A
titleOfInvention Auto-stop polishing composition and method
abstract A chemical-mechanical polishing composition for polishing a substrate having a silicon oxide material, comprising a liquid carrier, cubic abrasive particles dispersed in the liquid carrier, a self-stopping agent, and a cationic polymer, consisting of or consisting essentially of these;
priorityDate 2019-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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