http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022523709-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2020-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022523709-A |
| titleOfInvention | Sacrificial protective layer for the environment-sensitive surface of the substrate |
| abstract | Methods for protecting the surface of a substrate during processing include a) providing a solution to form a copolymer having a ceiling temperature and b) distributing the solution over the surface of the substrate to provide a sacrificial protective layer. The copolymer is velocically trapped to allow storage at temperatures above the ceiling temperature, and c) the substrate is exposed to ambient conditions for a predetermined period of time. ) Includes depolymerization of the sacrificial protective layer by using a stimulus selected from the group consisting of ultraviolet (UV) light and heat. [Selection diagram] Fig. 6 |
| priorityDate | 2019-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.