http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022504415-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D3-009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D3-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-02 |
| filingDate | 2019-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022504415-A |
| titleOfInvention | Process for producing isomer-enriched higher silanes |
| abstract | A method for selectively synthesizing n-tetrasilane is disclosed. N-tetrasilane is prepared by thermal decomposition of silane (SiH4), disilane (Si2H6), trisilane (Si3H8) or a mixture thereof. More specifically, the disclosed synthetic methods adjust and optimize the n-tetrasilane: i-tetrasilane isomer ratio. The isomer ratio can be optimized by selecting process parameters such as temperature, residence time and relative amount of starting compound. The disclosed synthetic methods allow easy preparation of n-tetrasilane. [Selection diagram] Fig. 1 |
| priorityDate | 2018-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.