| abstract |
The synthesis of silanes with more than 3 silicon atoms (ie, n = 4-100 (Si n H (2n + 2) )) is disclosed. More particularly disclosed synthesis methods are temperature, residence time and departure. The isomer ratio is adjusted and optimized by selecting process parameters such as relative amounts of compounds, as well as by selecting the appropriate catalyst. The disclosed synthetic methods are silanes containing more than 3 silicon atoms. , particularly preferably allows easy preparation of silanes containing one major isomer. pure isomers and the isomer Enriched mixture, silane (SiH 4), disilane (Si 2 H 6), trisilane (Si 3 H 8 ) and their mixtures are prepared by catalytic conversion. [Selection diagram] Fig. 1 |