http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022144515-A

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filingDate 2021-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcc3fbcc35183dbc10d298cc56a8fb44
publicationDate 2022-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2022144515-A
titleOfInvention Microfluidic chip and manufacturing method thereof
abstract A technique for appropriately protecting electrodes of a microfluidic chip is provided. A microfluidic chip (1) has a substrate (10), an electrode (31), an insulating film (33), and a fluid containing portion (20). The electrode 31 is arranged on the upper surface of the substrate 10 . The insulating film 33 covers the upper surfaces of the electrodes 31 . The insulating film 33 is composed of an oxide film obtained by oxidizing the metal contained in the electrode 31 or a nitride film obtained by nitriding the metal contained in the electrode 31 . The fluid containing portion 20 can contain fluid above the insulating film 33 . [Selection drawing] Fig. 2
priorityDate 2021-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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