http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022131257-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bd0cdbc5c67cf4957ed83c89140748e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_865d619283d320e7dbc1151ab2fa654f |
| publicationDate | 2022-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022131257-A |
| titleOfInvention | Laminate grinding method, polycrystalline substrate manufacturing method, and laminate |
| abstract | An object of the present invention is to efficiently discharge grinding dust when grinding a laminate of a support substrate and a polycrystalline film, thereby suppressing wear of a grinding tool and extending the life of the grinding tool to reduce costs. Provided are a method of grinding a laminate, a method of manufacturing a polycrystalline substrate, and a laminate that can A laminate comprising a film-forming support substrate and a polycrystalline film formed on a film-forming target surface of the film-forming supporting substrate by a chemical vapor deposition method is ground into a disc shape with a core drill. a method of grinding a laminate, comprising: forming a discharge portion forming step of forming a grinding powder discharge portion penetrating in a thickness direction of the laminate in a part of a portion to be ground to be ground by the core drill; and forming the discharge portion. After the step, a grinding step of grinding the grinding target portion with the core drill to obtain a disk-shaped laminate, and in the discharge portion forming step, the grinding powder discharge portion is provided inside the grinding target portion. do not form [Selection drawing] Fig. 1 |
| priorityDate | 2021-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.