http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022094811-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-365 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate | 2020-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_473ec7dbaf937c3798f563773d0f33d1 |
| publicationDate | 2022-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022094811-A |
| titleOfInvention | Film formation method |
| abstract | An object of the present invention is to provide a film formation method capable of forming a film containing few impurities and excellent in crystallinity and surface flatness. A process of preparing a raw material solution, a mist generating process of generating mist from the raw material solution, a transporting process of transporting the mist from a mist generator to a film forming chamber, and a heat treatment of the transported mist to form a substrate. In the step of preparing the raw material solution, the raw material solution is prepared by mixing a metal chloride salt or an aqueous solution thereof with hydrogen peroxide. or dissolving a metal in a mixed solution of hydrochloric acid and hydrogen peroxide. [Selection drawing] Fig. 1 |
| priorityDate | 2020-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.