http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022093114-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8205ec6ee1cd95eb60a03826535bad97 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-38 |
| filingDate | 2020-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64643464c064e73d5eb5c1105c8bb26f |
| publicationDate | 2022-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022093114-A |
| titleOfInvention | Metal surface coating film forming composition containing a carboxy group-containing polymer |
| abstract | PROBLEM TO BE SOLVED: To provide a wiring substrate, a semiconductor device, and a manufacturing method thereof for preventing surface oxidation of a rewired metal and improving the adhesion between a semiconductor rewiring and an interlayer insulating film in a rewiring forming step in a semiconductor post-process. do. A metal surface coating film forming composition comprises a polymer containing a carboxy group and an organic solvent, wherein the polymer has a unit structure represented by the formula (I). In the formula, R 0 represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, and L 1 represents a direct bond, an ether bond, an amide bond or an ester bond. [Selection diagram] Fig. 3 |
| priorityDate | 2020-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 90.