http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022082440-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N9-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate | 2021-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60531c4db050e179b4edf6c34410d018 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0229388a0f46c7ab1125df7654c4f65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bc4b9c0cd95cdbab4a049723236bf81 |
| publicationDate | 2022-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022082440-A |
| titleOfInvention | Curing of molded film using multiple images of spatial light modulator |
| abstract | PROBLEM TO BE SOLVED: To provide a system for curing a molded film by using a plurality of images of a spatial light modulator. The molding system may include a spatial light modulator. The molding system may include a radiation source that illuminates the spatial light modulator with chemical rays. The molding system may include a beam splitter that receives chemical rays from the spatial light modulator and emits a first image of the spatial light modulator and a second image of the spatial light modulator. The molding system may include a beam combiner that receives the first image and the second image and emits a composite image including the first image and the second image offset from the first image. The forming system may include a projection system that receives the composite image and illuminates the formable material between the template and the substrate with a projection image in a plane of the formable material. [Selection diagram] None |
| priorityDate | 2020-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 21.