http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022029431-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C62-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-54 |
| filingDate | 2021-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5783c924eb99533d01f0b89dc260e78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2022-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022029431-A |
| titleOfInvention | Method for Producing Carboxylate, Carboxylic Acid Generator, Resin, Resist Composition and Resist Pattern |
| abstract | PROBLEM TO BE SOLVED: To provide a carboxylate capable of producing a resist pattern having good line edge roughness. A carboxylate represented by the formula (I). [In the formula, R 4 , R 5 , R 7 and R 8 represent halogen atoms, alkyl fluoride groups, etc., respectively. X 1 and X 2 represent O or S, respectively. m1 represents 1 to 5, m2 and m8 represent integers of 0 to 5, m4, m5 and m7 represent integers of 0 to 4, and 1 ≦ m1 + m7 ≦ 5 and 0 ≦ m2 + m8 ≦ 5. R 10 represents a hydrogen atom or a methyl group. X 10 represents a binding species such as an ether bond. L 10 represents a hydrocarbon group which may have a single bond or a substituent. * 10 represents the binding site with the benzene ring. X 0 represents a hydrocarbon group which may have a substituent. ] [Selection diagram] None |
| priorityDate | 2020-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 429.