| abstract |
PROBLEM TO BE SOLVED: To provide a novel spin-coatable hard mask coating composition. SOLUTION: The coating composition contains a solvent, metal oxide nanoparticles dispersed in the solvent, and a high carbon polymer dissolved in the solvent, wherein the high carbon polymer is a repeating unit of the structure (1). It contains a hydroxybiphenyl repeating unit of structure (2) and a moiety containing a condensed aromatic-containing portion of structure (3), in which R1 and R2 are independently composed of hydrogen, alkyl and substituted alkyl. Selected from, Ar is an unsubstituted or substituted fused aromatic ring, and X1 is an alkylene spacer or a direct valence bond. TIFF2022008874000026.tif36170 [Selection diagram] None |