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filingDate 2019-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2021526120-A
titleOfInvention Method for Forming Multilayer Hexagonal Boron Nitride Sheet
abstract A method for forming a multilayer hexagonal boron nitride sheet, which includes 1) a step of providing a substrate (3), 2) a step of providing a boron-containing solid catalyst, and a step of arranging a boron-containing solid catalyst on the substrate (3). 3) The step of melting the boron-containing solid catalyst by annealing the boron-containing solid catalyst, and 4) the nitrogen-containing gas and the shield gas are simultaneously introduced into the environment where the melted boron-containing solid catalyst is located, and the nitrogen-containing gas is introduced. Includes a step of forming a multilayer hexagonal boron nitride sheet on the surface of the substrate (3) by reacting with a boron-containing solid catalyst. According to the method for forming a multilayer hexagonal boron nitride sheet, it is possible to form a hexagonal boron nitride sheet having a lateral size reaching an inch level and a thickness of several nanometers to several hundreds of nanometers on the surface of the substrate. .. The method for forming the multi-layer hexagonal boron nitride sheet has simple formation conditions, is low cost, and is environmentally friendly. In addition, the range of growth parameters is wide and the reproducibility is excellent. Therefore, it lays a good foundation for the application of hexagonal boron nitride in the field of two-dimensional material devices. [Selection diagram] Fig. 1
priorityDate 2018-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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