| abstract |
It has a molecular weight in the range of about 332 daltons to about 100,000 daltons with the catalyst and / or polysilane, and has the following formula [-N (SiH 3 ) x (SiH 2- ) y ] (in the formula, x = 0, 1 or 2, y = 0, 1 or 2, x + y = 2, and x = 0, 1 or 2, y = 1, 2 or 3, and x + y = 3. ), A Si-containing film-forming composition comprising NH-free, C-free and Si-rich perhydropolysilazane. Synthesis methods and their uses are also disclosed. [Selection diagram] Fig. 1 |