http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021510449-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-1016 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-201 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-054 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-201 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-20008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00 |
| filingDate | 2019-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2021510449-A |
| titleOfInvention | X-ray metering system with broadband laser-produced plasma illuminator |
| abstract | An X-ray-based semiconductor weighing method and system utilizing a broadband soft X-ray illumination source is described herein. A laser-produced plasma (LPP) light source produces high-intensity broadband soft X-ray illumination. The LPP light source directs a high-focus, short-duration laser light source to a liquid or solid non-metal droplet target. In one example, the droplet generator ejects a row of nominal 50 μm droplets of feed material at a rate of 50-400 kHz. In some embodiments, the duration of each excitation light pulse is less than 1 nsec. In some embodiments, the duration of each excitation light pulse is less than 0.5 nsec. In some embodiments, the LPP light source has a gas separation system that separates the unconsumed feed material from other gases in the plasma chamber and resupplyes the separated feed material to the droplet generator. |
| priorityDate | 2018-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.