| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D333-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D339-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D335-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D321-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D317-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-33 |
| filingDate |
2021-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4904ffc3b7e31e3855846fcf0d3dc9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate |
2021-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2021176851-A |
| titleOfInvention |
Method for producing salt, acid generator, resist composition and resist pattern |
| abstract |
PROBLEM TO BE SOLVED: To provide a salt capable of producing a resist pattern with good CD uniformity (CDU) and a resist composition containing the salt. A salt having an anion represented by the formula (aa1) [In the formula (aa1), X 1 represents an alkanetriyl group having 1 to 3 carbon atoms. X a and X b independently represent an oxygen atom or a sulfur atom, respectively. Ring W represents a ring or the like represented by the formula (w1-1) having at least one substituent selected from the group A. L b1 represents a group or the like represented by the formula (X1-A). Q 1 and Q 2 independently represent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. ]. [Selection diagram] None |
| priorityDate |
2016-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |