http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021153140-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2020-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_439ba90653ee678ccf7cf9368f2dc908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f0f45e2198a21cf2a95316908dbb3b1 |
| publicationDate | 2021-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2021153140-A |
| titleOfInvention | Board processing method and board processing equipment |
| abstract | PROBLEM TO BE SOLVED: To provide a substrate processing method and a substrate processing apparatus capable of effectively peeling a processing film holding an object to be removed from a surface of a substrate. In a substrate processing method, a processing film supplied to the surface of a substrate is solidified or cured to form a processing film on the surface of the substrate that holds an object to be removed (treatment). Membrane formation process). By supplying the release liquid toward the surface of the substrate, the treatment film is partially dissolved in the release liquid, and the treatment film holding the object to be removed is peeled off from the surface of the substrate. The film is removed from the substrate (peeling removal step). By supplying the residue removing liquid toward the surface of the substrate after the peeling elimination step, the residue of the treated membrane is removed (residue removing step). The stripping liquid is a mixed liquid of an organic solvent and water, and the residue removing liquid is an organic solvent made of the same substance as the organic solvent in the mixed liquid. [Selection diagram] FIG. 8 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7324339-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022190451-A1 |
| priorityDate | 2020-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 64.