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filingDate 2021-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2021141332-A
titleOfInvention Semiconductor device
abstract PROBLEM TO BE SOLVED: To provide a semiconductor device having stable electrical characteristics. A transistor having a first to third oxide semiconductor layer, a gate electrode, and a gate insulating layer, wherein the second oxide semiconductor layer has a first oxide semiconductor layer and a third oxide. It has a portion provided between the material semiconductor layer, the gate insulating layer has a region in contact with the upper surface of the third oxide semiconductor layer, and the gate electrode and the upper surface of the above-mentioned portion are the gate insulating layer. The gate electrode and the side surface of the above-mentioned portion in the channel width direction have a region facing each other via a gate insulating layer, and the second oxide semiconductor layer has a region overlapping with each other. Thickness is 2 nm or more and 8 nm The second oxide semiconductor layer has a region of less than 60 nm and has a length of less than 60 nm in the channel width direction. [Selection diagram] Fig. 1
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