| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate |
2020-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_231ce5715ac08c044117ff10bcf12383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2c30a4082fe49f16134346db0f898df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07f6ed8ccc9497566c5c1fdb0c168556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba7e8597fba67de505f7b4513d452d39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15386c17ba6fc75618cb950166b455d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e5f6eac5fb3ac2e7cfef57e217fafe6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1757b13fe0db8523349a2cdb9e8b78ce |
| publicationDate |
2021-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2021097227-A |
| titleOfInvention |
Method for Forming Vanadium Nitride Layer and Structure Containing Vanadium Nitride Layer |
| abstract |
PROBLEM TO BE SOLVED: To disclose a method and a system for depositing a vanadium nitride layer on a surface of a substrate, and a structure and a device formed by using the method. An exemplary method involves depositing a vanadium nitride layer on the surface of a substrate using a periodic deposition process. The periodic deposition process may include supplying the reaction chamber with a vanadium halide precursor and separately supplying the reaction chamber with a nitrogen reactant. The periodic deposition process can preferably be a thermal periodic deposition process. [Selection diagram] Fig. 1 |
| priorityDate |
2019-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |