http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021096464-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C65-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C65-05 |
| filingDate | 2020-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5756d88bd4de1b02e40fcc310564b566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5a0f29773a00a81cffeccef5e6a21c8 |
| publicationDate | 2021-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2021096464-A |
| titleOfInvention | Method for producing resist composition and resist pattern, and carboxylic acid salt and carboxylic acid generator |
| abstract | PROBLEM TO BE SOLVED: To provide a resist composition, a carboxylic acid salt and a carboxylic acid generator capable of producing a resist pattern having good CD uniformity (CDU). A resist composition containing a carboxylic acid salt represented by (IA) or (IB). R 1 , R 2 , R 6 and R 7 represent hydrocarbon groups which may have substituents, respectively, and -CH 2 − contained in the hydrocarbon group is -O-, -S-,-. It may be replaced by CO- or -SO 2- , and R 1 and R 2 , R 6 and R 7 may be combined with each other to form a ring. R 3 represents a halogen atom or an alkyl fluoride group. R 4 and R 5 represent a halogen atom, a hydroxy group, an alkyl group and the like. [Selection diagram] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023068251-A1 |
| priorityDate | 2019-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.