http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021048351-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-00 |
| filingDate | 2019-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b3622a683312ca8709cebb7b8178eb8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9742ebbd77041e023ebdc170d025f0f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdbc93930f8a2fa29a256b1f666e1903 |
| publicationDate | 2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2021048351-A |
| titleOfInvention | Inspection method and inspection equipment |
| abstract | PROBLEM TO BE SOLVED: To provide a technique capable of detecting an electromagnetic wave by reducing an offset. An object that is a semiconductor device is inspected. The inspection method consists of an irradiation step in which the optical modulator modulates the pulsed light emitted from the light source with a variable modulation frequency and irradiates the object with the modulated pulsed light, and the detector uses an electromagnetic wave pulse from the object. A detection process that outputs an electric signal based on the intensity of the electromagnetic pulse, and the lock-in amplifier extracts a detection signal indicating the intensity of the electromagnetic wave pulse from the electric signal based on the reference signal according to the modulation frequency, and the intensity of the electromagnetic wave pulse. It includes a setting step of resetting at least one of the modulation frequency and the phase of the reference signal so that the offset amount is within the specified range including zero. [Selection diagram] FIG. 7 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102535830-B1 |
| priorityDate | 2019-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448129216 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11600682 |
Total number of triples: 18.