http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021038112-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-365 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-16 |
| filingDate | 2019-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d0620c9bf723ee9d2202cabc1336321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_473ec7dbaf937c3798f563773d0f33d1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e0bb7d17cc5fad7d2206f8edc083a38 |
| publicationDate | 2021-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2021038112-A |
| titleOfInvention | Laminated structures, semiconductor devices and semiconductor systems |
| abstract | 【Task】 An object of the present invention is to provide a laminated structure having a crystalline oxide film having a beta-gallian structure, which is excellent in mobility and is thermally stable and suitable for a semiconductor device. SOLUTION: A laminated structure having a substrate and a crystalline oxide film having a beta-gallian structure, wherein the substrate is a single crystal substrate containing lithium tantalate as a main component, and the crystalline oxide film contains a dopant. A laminated structure having a mobility of 30 cm 2 / Vs or more. [Selection diagram] Fig. 1 |
| priorityDate | 2019-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.