http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020535392-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0971 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0971 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-131 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-00 |
| filingDate | 2018-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020535392-A |
| titleOfInvention | Fluorine detection in gas discharge light source |
| abstract | The devices include a gas maintenance system having a gas supply system fluidly connected to one or more gas discharge chambers, a detection device fluidly connected to each gas discharge chamber, and a gas maintenance system and a control system connected to the detection device. And, including. The detection device includes a container for accommodating the metal oxide and defining a reaction cavity fluidly connected to the gas discharge chamber, and receiving a mixed gas containing fluorine from the gas discharge chamber into the reaction cavity. This container makes it possible to form a new gas mixture containing oxygen by the reaction of fluorine of the received mixed gas with a metal oxide. The detector also includes an oxygen sensor that is fluid-connected to the new gas mixture to detect the amount of oxygen in the new gas mixture. The control system is configured to estimate the concentration of fluorine in the received mixed gas. [Selection diagram] Fig. 1 |
| priorityDate | 2017-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.