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publicationNumber JP-2020530206-A
titleOfInvention Bandgap measurement of patterned membrane stacks using spectrometric
abstract It is a spectroscopic weighing system and has a spectroscopic weighing tool and a controller. The controller is a multi-layer lattice model having two or more layers, and generates a model including a geometric parameter indicating the geometry of the test layer of the multi-layer lattice and a dispersion parameter indicating the dispersion of the test layer. .. The controller also receives the spectroscopic signal of the multi-layer grid created for the model multi-layer grid from the spectrometric tool. The controller further determines the values of one or more parameters of the model multilayer lattice so that the simulated spectroscopic signal corresponding to the measured spectroscopic signal is brought within the specified tolerance. The controller further predicts the bandgap of the test layer of the created multilayer lattice based on the determined values of one or more parameters of the test layer of the created structure.
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