| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L53-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L11-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L27-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L53-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L9-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27D21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27D17-00 |
| filingDate |
2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2020519035-A |
| titleOfInvention |
Triple pipe heating device for heating exhaust gas in semiconductor and LCD manufacturing process that is easy to install |
| abstract |
INDUSTRIAL APPLICABILITY The present invention is capable of effectively heating exhaust gas with a small amount of heat without using nitrogen gas, and since it can be expanded and contracted and bent while having a triple piping structure, installation is easy and exhaust gas The present invention relates to a triple pipe heating device for heating exhaust gas in a semiconductor and LCD manufacturing process, which enables rapid detection of leakage and overheating. |
| priorityDate |
2017-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |