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filingDate 2018-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2020514509-A
titleOfInvention Lithographic composition and method of using the same
abstract A masking composition for preventing metal contamination on the edges of a substrate during the manufacture of electronic devices. The masking composition has units of structure (I): Also provided are methods of using the masking composition to make electronic devices.
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