http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020187102-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7af673589ca45d2fd8b9ea902cdbd1dc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2019-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d1df9cfd6fb42790453109b53599b9b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3995d524453308b0e1ae4115b971cbb3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0312d2ab548059b8e0b5fb8ad6dcbbc |
| publicationDate | 2020-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020187102-A |
| titleOfInvention | Inspection method and inspection equipment for semiconductor devices |
| abstract | PROBLEM TO BE SOLVED: To provide a novel inspection method for inspecting the characteristics of a semiconductor device. SOLUTION: When an inspection method of a semiconductor device in which a switching element having a gate electrode 18 is formed on a silicon carbide semiconductor substrate 10 is performed, a parasitic diode 21 configured in the switching element is subjected to a forward direction in terms of use conditions. Based on the pulse current, the temperature of the parasitic diode 22 is derived from the forward voltage of the parasitic diode 22 when the pulse current is flowing through the parasitic diode 22, and the derived temperature is assumed to be the parasitic diode 22. The pulse current flowing through the parasitic diode 22 is adjusted so that the temperature is lower than the threshold temperature based on the usage conditions, and the characteristics of the switching element are inspected. [Selection diagram] Fig. 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022202076-A1 |
| priorityDate | 2019-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863 |
Total number of triples: 19.