http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020176273-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38 |
filingDate | 2020-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0578340d8eda8655050b54e7ae628333 |
publicationDate | 2020-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2020176273-A |
titleOfInvention | Compounds and resins |
abstract | PROBLEM TO BE SOLVED: To provide a compound capable of forming a resin used in a resist composition capable of producing a resist pattern with a good focus margin (DOF). A compound represented by the formula (I'). [In formula (I'), R 1 represents a hydrogen atom or a methyl group. R 2 to R 4 each represent a hydrogen atom. m and n each represent 1. A 1 'is a divalent hydrocarbon group having 1 to 12 carbon atoms or * -A 2 -X 1 - (A 3 -X 2) a - (A 4) b - represents a. * Represents a bond with an oxygen atom. A 2 to A 4 independently represent divalent hydrocarbon groups having 1 to 12 carbon atoms. X 1 and X 2 independently represent -O-, -CO-O-, -O-CO- or -O-CO-O-, respectively. a represents 0 or 1. b represents 0 or 1. ] [Selection diagram] None |
priorityDate | 2015-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 219.