http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020174153-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e10cb0cb594753d916bfe485c4504a4f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-365 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aabc9cadc00caa1550189238a8ff8817 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be5775a9f6cd31d99ffd494758fbd596 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23e7262c8ad58c96cdba6dd4a40a0d92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06c219b6079648ec1b793dfd1499ee3f |
| publicationDate | 2020-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020174153-A |
| titleOfInvention | Manufacturing method of gallium oxide semiconductor film |
| abstract | 【Task】 It is an object of the present invention to provide a method for producing a gallium oxide semiconductor film by a mist CVD method, which can obtain a high quality gallium oxide semiconductor film having excellent crystallinity and the like with high productivity. SOLUTION: A gallium oxide semiconductor film in which a mist generated by atomizing or dropletizing a raw material solution is conveyed using a carrier gas, the mist is heated, and the mist is thermally reacted on a substrate to form a film. A method for producing a gallium oxide semiconductor film, wherein the hydrogen ion concentration in the raw material solution is 1 × 10 -12 to 1 × 10 −2 mol / L. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022215621-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023058273-A1 |
| priorityDate | 2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.